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Fabrication and design of resonant microdevices /

Bahreyni, Behraad

Fabrication and design of resonant microdevices / Behraad Bahreyni. - xiii, 181 pages : illustrations ; 26 cm - Micro & nano technologies ; 3 .

Includes bibliographical references and index

The book is an accessible introduction to the main issues surrounding the creation and application of micromachined resonant devices.

ISBN: 9780815515777

Subjects--Topical Terms:
Microelectromechanical systems -- Design and construction
Microfabrication
Resonance

Dewey Class. No.: 621 BAH

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Fabrication and design of resonant microdevices /