Sputtering materials for VLSI and thin film devices /
Sarkar, Jaydeep
Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - vii,603 pages ; 24 cm.
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield.
9780815515937
computer engineering
Electrical engineering.
621.381 SAR
Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - vii,603 pages ; 24 cm.
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield.
9780815515937
computer engineering
Electrical engineering.
621.381 SAR