Sputtering materials for VLSI and thin film devices / (Record no. 492554)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01094nam a22002177a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20260507114317.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 260507b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780815515937 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | Kenya National Library Service |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 SAR |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Sarkar, Jaydeep |
| Relator term | author. |
| 245 ## - TITLE STATEMENT | |
| Title | Sputtering materials for VLSI and thin film devices / |
| Statement of responsibility, etc. | Jaydeep Sarkar. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | vii,603 pages ; |
| Dimensions | 24 cm. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | computer engineering |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electrical engineering. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | Books |
| Suppress in OPAC | No |
| Withdrawn status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Nakuru Library | Acquisition, Cataloguing, Classification and Distribution Development | 05/07/2026 | 15625.00 | 621.381 | B232058 | 05/07/2026 | 05/07/2026 | Books |