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Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.
Material type:
TextDescription: vii,603 pages ; 24 cmISBN: - 9780815515937
- 621.381 SAR
| Item type | Current library | Call number | Status | Date due | Barcode | |
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Acquisition, Cataloguing, Classification and Distribution Development | 621.381 (Browse shelf(Opens below)) | Available | B232058 |
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| 621.35 APP Applied superconductivity : handbook on devices and applications / | 621.36 FRI ADVANCE in the speckle metrology and related techniques | 621.361 CRE Neutron and x-ray optics / | 621.381 Sputtering materials for VLSI and thin film devices / | 621.381 BRI Starting electronics / | 621.381 FOR Organic electronics : foundations to applications / | 621.381 JOH Introductory radio and television electronics / |
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield.
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