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Semiconductor technology / V. A. Bruk, V. V. Garshenin, A. I. Kurnosov ; translate from Russian by A. Ulyanov.

By: Contributor(s): Material type: TextTextDescription: 335 pages : Illustrations ; 20 cmSubject(s): DDC classification:
  • 621.38152 BRU
Summary: The present book briefly describes the basic processes and operations in the manufacture of semiconductor devices.
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