Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.

By:

Sarkar, Jaydeep [author.]

Material type: Text

TextDescription: vii,603 pages ; 24 cmISBN:

9780815515937

Subject(s):

DDC classification:

621.381 SAR

Summary: An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield.

List(s) this item appears in: Mativo may 2026

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	Acquisition, Cataloguing, Classification and Distribution Development	621.381 (Browse shelf(Opens below))	Available		B232058

An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield.

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Library Catalog

Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.