| 000 | 00412nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 240531s9999 xx 000 0 und d | ||
| 020 | _a978 0 8155 2037 5 | ||
| 082 | _a671 735 MAT | ||
| 100 | _aMattox, Donald M. | ||
| 245 | 0 | _aHandbook of physical vapor deposition (PVD) processing | |
| 260 |
_aAmsterdam _b William Andrew _c2009 |
||
| 650 | _aPHYSICAL VAPOR DEPOSITION HANDBOOKS MANUALS ETC | ||
| 942 | _cANF | ||
| 999 |
_c343616 _d343616 |
||