000 00946nam a22002537a 4500
003 OSt
005 20260421113607.0
008 260421b |||||||| |||| 00| 0 eng d
020 _a9780815515777
040 _aKenya National Library Service
082 _a621 BAH
100 _aBahreyni, Behraad
245 _aFabrication and design of resonant microdevices /
_cBehraad Bahreyni.
300 _axiii, 181 pages :
_billustrations ;
_c26 cm
490 _aMicro & nano technologies ; 3
504 _aIncludes bibliographical references and index
520 _aThe book is an accessible introduction to the main issues surrounding the creation and application of micromachined resonant devices.
650 _aMicroelectromechanical systems -- Design and construction
650 _aMicrofabrication
650 _aResonance
942 _2ddc
_cBK
_n0
999 _c492299
_d492299