| 000 | 00946nam a22002537a 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20260421113607.0 | ||
| 008 | 260421b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780815515777 | ||
| 040 | _aKenya National Library Service | ||
| 082 | _a621 BAH | ||
| 100 | _aBahreyni, Behraad | ||
| 245 |
_aFabrication and design of resonant microdevices / _cBehraad Bahreyni. |
||
| 300 |
_axiii, 181 pages : _billustrations ; _c26 cm |
||
| 490 | _aMicro & nano technologies ; 3 | ||
| 504 | _aIncludes bibliographical references and index | ||
| 520 | _aThe book is an accessible introduction to the main issues surrounding the creation and application of micromachined resonant devices. | ||
| 650 | _aMicroelectromechanical systems -- Design and construction | ||
| 650 | _aMicrofabrication | ||
| 650 | _aResonance | ||
| 942 |
_2ddc _cBK _n0 |
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| 999 |
_c492299 _d492299 |
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