000			01094nam a22002177a 4500
003			OSt
005			20260507114317.0
008			260507b |||||||| |||| 00| 0 eng d
020			_a9780815515937
040			_aKenya National Library Service
082			_a621.381 SAR
100			_aSarkar, Jaydeep _eauthor.
245			_aSputtering materials for VLSI and thin film devices / _c Jaydeep Sarkar.
300			_avii,603 pages ; _c24 cm.
520			_aAn important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield.
650			_acomputer engineering
650			_aElectrical engineering.
942			_2ddc _cBK _n0
999			_c492554 _d492554